Diamond-like carbon films have been deposited from a fullerite target by ultra-short pulsed laser deposition technique. The results indicate that the films morphology and structure, determined by scanning electron microscopy, atomic force microscopy and energy dispersive X-ray diffraction, depend strongly on the substrate temperature. X-ray photoelectron. X-ray Auger electron, Raman and surface enhanced Raman scattering spectra indicate that the fs-DLC films composition involves a mixed sp, sp(2) and sp(3) carbon network consisting of aromatic rings and sp(3) diamond-like structures linked by chains of different lengths and composition. The films deposited at room temperature, presenting the higher content of sp(3) carbon (48%), also contain C(60) crystalline phase and show a very high hardness of 49 GPa.
Diamond-like carbon thin films produced by femtosecond pulsed laser deposition of fullerite
DE BONIS, ANGELA;TEGHIL, Roberto
2011-01-01
Abstract
Diamond-like carbon films have been deposited from a fullerite target by ultra-short pulsed laser deposition technique. The results indicate that the films morphology and structure, determined by scanning electron microscopy, atomic force microscopy and energy dispersive X-ray diffraction, depend strongly on the substrate temperature. X-ray photoelectron. X-ray Auger electron, Raman and surface enhanced Raman scattering spectra indicate that the fs-DLC films composition involves a mixed sp, sp(2) and sp(3) carbon network consisting of aromatic rings and sp(3) diamond-like structures linked by chains of different lengths and composition. The films deposited at room temperature, presenting the higher content of sp(3) carbon (48%), also contain C(60) crystalline phase and show a very high hardness of 49 GPa.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
