NbC crystalline films have been deposited in vacuum by ultra-short pulsed laser deposition technique. The films have been characterized by transmission and scanning electron microscopies and by X-ray diffraction. To clarify the ablation-deposition mechanism, the plasma produced by the ablation process has been characterized by optical emission spectroscopy and fast imaging. A comparison of the results with those obtained by ns pulsed deposition of the same target has been carried out.

Pulsed laser ablation and deposition of niobium carbide

SANSONE, MARIA;DE BONIS, ANGELA;SANTAGATA, Antonio;GALASSO, Agostino;TEGHIL, Roberto
2016-01-01

Abstract

NbC crystalline films have been deposited in vacuum by ultra-short pulsed laser deposition technique. The films have been characterized by transmission and scanning electron microscopies and by X-ray diffraction. To clarify the ablation-deposition mechanism, the plasma produced by the ablation process has been characterized by optical emission spectroscopy and fast imaging. A comparison of the results with those obtained by ns pulsed deposition of the same target has been carried out.
2016
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11563/120436
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