For meticulous calibration of ultrasonic probes, hydrophones are usually used but it is difficult to find hydrophones that can operate up to 30 MHz with a very large bandwidth. Our group has a long experience in fabrication of the new cMUT transducers; these devices can easily operate in the high frequency range due to the silicon micromachining technology used. In order to calibrate large bandwidth high frequency cMUT array probes, we designed and fabricated a single element transducer on the same wafer used for the cMUT array. Since the sensor is fabricated on the same wafer, it has the same characteristics of the probe and, hence, the measurements are possible in the same operative range (3-20 MHz). Our initial results for cMUT single-element sensor are promising

cMUT Sensor for Applications as a Wide-band Acoustic Receiver in the MHz Range

IULA, Antonio;
2010

Abstract

For meticulous calibration of ultrasonic probes, hydrophones are usually used but it is difficult to find hydrophones that can operate up to 30 MHz with a very large bandwidth. Our group has a long experience in fabrication of the new cMUT transducers; these devices can easily operate in the high frequency range due to the silicon micromachining technology used. In order to calibrate large bandwidth high frequency cMUT array probes, we designed and fabricated a single element transducer on the same wafer used for the cMUT array. Since the sensor is fabricated on the same wafer, it has the same characteristics of the probe and, hence, the measurements are possible in the same operative range (3-20 MHz). Our initial results for cMUT single-element sensor are promising
9781457703805
File in questo prodotto:
Non ci sono file associati a questo prodotto.

I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.

Utilizza questo identificativo per citare o creare un link a questo documento: http://hdl.handle.net/11563/9604
 Attenzione

Attenzione! I dati visualizzati non sono stati sottoposti a validazione da parte dell'ateneo

Citazioni
  • ???jsp.display-item.citation.pmc??? ND
  • Scopus 9
  • ???jsp.display-item.citation.isi??? ND
social impact