A High Frequency cMUT Probe for Ultrasound Imaging of Fingerprints

Fingerprint imaging using ultrasound has been investigated for several years and has shown to be a valid alternative to optical scanners. Capacitive micro-machined ultrasound transducers (cMUT) is an emerging MEMS technology that can be profitably exploited in biometric applications, like fingerprint or palm print. In this work a FEM model of a cMUT is proposed and used to design a 192-element array with a frequency band centered at 12.5 MHz. A cMUT array was manufactured by means of a proprietary fabrication process and an ultrasound probe was assembled and experimentally characterized. Comparison between simulation and experimental results has shown a quite good agreement. The cMUT probe was operated at a frequency of 12 MHz and used to produce images of fingerprints, the quality of which was quite satisfactory.